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1 Ergebnisse
1
Low to Medium Dose Room and Elevated Temperature Implants i..:
, In:
2023 20th China International Forum on Solid State Lighting & 2023 9th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS)
,
Ge, Huan
;
Zhao, Wanli
;
Zhu, Tao
... - p. 117-121 , 2023
Link:
https://doi.org/10.1109/SSLChinaIFWS60785.2023.1039970
RT T1 <cTitle>2023 20th China International Forum on Solid State Lighting & 2023 9th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS)</cTitle>: T1 <Title>Low to Medium Dose Room and Elevated Temperature Implants in 4H-SiC Devices</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10399700&Exemplar=1&LAN=DE A1 Ge, Huan A1 Zhao, Wanli A1 Zhu, Tao A1 Yan, Jingrong A1 Wang, Rui A1 Li, Zheyang A1 Jin, Rui YR 2023 K1 Temperature measurement K1 Performance evaluation K1 Temperature distribution K1 MOSFET K1 Ion implantation K1 Silicon carbide K1 Implants K1 implantation K1 Temperature K1 Dose K1 Damage SP 117 OP 121 LK http://dx.doi.org/https://doi.org/10.1109/SSLChinaIFWS60785.2023.10399700 DO https://doi.org/10.1109/SSLChinaIFWS60785.2023.10399700 SF ELIB - SuUB Bremen
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