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Quality Prediction of PECVD Process with Random Forest and ..:

, In: 2023 29th International Conference on Mechatronics and Machine Vision in Practice (M2VIP),
Fu, Yilei ; Zhang, Zhisheng ; Xia, Zhijie... - p. 1-6 , 2023
Link: https://doi.org/10.1109/M2VIP58386.2023.10413390