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Intercalated Graphene as Next Generation Back-end-of-Line C..:

, In: 2023 International Electron Devices Meeting (IEDM),
Li, S. W. ; Chan, Y. C. ; Hsu, C. H.... - p. i-iv , 2023
Link: https://doi.org/10.1109/IEDM45741.2023.10413750