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1 Ergebnisse
1
Sustainable Environmental Technologies for Advanced Semicon..:
, In:
2023 International Electron Devices Meeting (IEDM)
,
Lee, Hyun Chul
;
Oh, Sehyeong
;
Yang, Dong Sik
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/IEDM45741.2023.10413847
RT T1
2023 International Electron Devices Meeting (IEDM)
: T1
Sustainable Environmental Technologies for Advanced Semiconductor Manufacturing Intelligent FAB
UL https://suche.suub.uni-bremen.de/peid=ieee-10413847&Exemplar=1&LAN=DE A1 Lee, Hyun Chul A1 Oh, Sehyeong A1 Yang, Dong Sik A1 Koo, Min Seok A1 Ham, Dong Jin A1 Jeong, Joonseon A1 Kang, Sungwoo A1 Chang, Jaehee A1 Heo, Hyeon-Su A1 Kim, Mijong A1 Ha, Jonghyun A1 Kuk, Su Keun A1 Lee, Dong Jin A1 Chung, Jai Young A1 Kim, Dongwook A1 Kim, Jaeeun A1 Lee, Jong-Min A1 Kwon, Hyuk Jae A1 Kang, Jinkyu A1 Kim, Jae-Young A1 Jung, Yu Kyung A1 Shim, Wooyong A1 Song, Seung Hoon A1 Kim, Jinha A1 Lee, Jaesoo A1 Kim, Dohoon A1 Nam, Junghun A1 Lee, Da-Hee A1 Choi, Hojun A1 Kim, Se-Yeon A1 Suh, Min-Soo A1 Shin, Sangyoon A1 Kim, JinHo A1 Chen, Yanfang A1 Kim, Hwajin YR 2023 SN 2156-017X K1 Microorganisms K1 HVAC K1 Buildings K1 Semiconductor device manufacture K1 Air pollution K1 Iron K1 Photocatalysts SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IEDM45741.2023.10413847 DO https://doi.org/10.1109/IEDM45741.2023.10413847 SF ELIB - SuUB Bremen
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