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1 Ergebnisse
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Innovative Silicon-Ceramic (SiCer) Technology for High-Stre..:
, In:
2023 24th European Microelectronics and Packaging Conference & Exhibition (EMPC)
,
Kleinholz, Cathleen
;
Fischer, Michael
;
Gutzeit, Nam
... - p. 1-6 , 2023
Link:
https://doi.org/10.23919/EMPC55870.2023.10418331
RT T1 <cTitle>2023 24th European Microelectronics and Packaging Conference & Exhibition (EMPC)</cTitle>: T1 <Title>Innovative Silicon-Ceramic (SiCer) Technology for High-Strength Pressure Sensor Applications Using Different Manufacturing Methods</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10418331&Exemplar=1&LAN=DE A1 Kleinholz, Cathleen A1 Fischer, Michael A1 Gutzeit, Nam A1 Cyriax, Andrea A1 Hintz, Michael A1 Ortlepp, Thomas A1 Muller, Jens YR 2023 K1 Pressure sensors K1 Temperature sensors K1 Silicon K1 Manufacturing K1 Ceramics K1 Bonding K1 Piezoresistance K1 piezoresistive pressure sensor K1 SiCer K1 LTCC K1 ceramic K1 silicon K1 low pressure assisted sintering K1 burst pressure SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.23919/EMPC55870.2023.10418331 DO https://doi.org/10.23919/EMPC55870.2023.10418331 SF ELIB - SuUB Bremen
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