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Advanced Dry Etching of GaAs/AlGaAs Multilayer Wafer for Ci..:

, In: 2022 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR),
Ye, Hanqiao ; Xiong, Yifan ; Zuo, Rubing... - p. 1-2 , 2022
Link: https://doi.org/10.1109/CLEO-PR62338.2022.10431997