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1 Ergebnisse
1
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputte..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Cho, Sinwoo
;
Barrera, Omar
;
Simeoni, Pietro
... - p. 1083-1086 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439299
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439299&Exemplar=1&LAN=DE A1 Cho, Sinwoo A1 Barrera, Omar A1 Simeoni, Pietro A1 Wang, Ellie Y. A1 Kramer, Jack A1 Chulukhadze, Vakhtang A1 Campbell, Joshua A1 Rinaldi, Matteo A1 Lu, Ruochen YR 2024 SN 2160-1968 K1 Electrodes K1 Q-factor K1 Platinum K1 Scandium K1 Acoustics K1 Film bulk acoustic resonators K1 Resonators K1 Acoustic resonators K1 millimeter-wave devices piezoelectric devices K1 scandium aluminum nitride K1 thin-film bulk acoustic resonators SP 1083 OP 1086 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439299 DO https://doi.org/10.1109/MEMS58180.2024.10439299 SF ELIB - SuUB Bremen
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