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1 Ergebnisse
1
Broadband and High-Pressure Output PMUT Array Based on Lead..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Zhao, Lei
;
Yang, Chong
;
Zhang, Xinyue
.. - p. 979-982 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439309
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Broadband and High-Pressure Output PMUT Array Based on Lead-Free KNN Thin Film</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439309&Exemplar=1&LAN=DE A1 Zhao, Lei A1 Yang, Chong A1 Zhang, Xinyue A1 You, Zhiwei A1 Lu, Yipeng YR 2024 SN 2160-1968 K1 Fabrication K1 Wet etching K1 Ultrasonic imaging K1 Sensitivity K1 Medical devices K1 Lead K1 Consumer electronics K1 KNN K1 PMUT K1 bandwidth K1 transmitting sensitivity K1 wet etch K1 lead-free SP 979 OP 982 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439309 DO https://doi.org/10.1109/MEMS58180.2024.10439309 SF ELIB - SuUB Bremen
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