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1 Ergebnisse
1
Biaxial Lissajous Scanning Piezoelectric MEMS Mirror Based ..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Huang, Hao
;
Wang, Lihao
;
Wang, Yang
... - p. 166-169 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439316
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Biaxial Lissajous Scanning Piezoelectric MEMS Mirror Based on High Fill Factor and Large Optical Aperture</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439316&Exemplar=1&LAN=DE A1 Huang, Hao A1 Wang, Lihao A1 Wang, Yang A1 Liu, Yichen A1 Su, Yongquan A1 Zhu, Weihong A1 Zhang, Yonggui A1 Wu, Zhenyu YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Laser radar K1 Crosstalk K1 Apertures K1 Optical crosstalk K1 Optical sensors K1 Micromirrors K1 Biaxial micromirror K1 piezoelectric actuation K1 high fill factor K1 large aperture K1 LiDAR SP 166 OP 169 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439316 DO https://doi.org/10.1109/MEMS58180.2024.10439316 SF ELIB - SuUB Bremen
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