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1 Ergebnisse
1
4H-SiC Beam Resonators with Tailored Local Zero TCF:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Long, Yaoyao
;
Liu, Zhenming
;
Jiang, Xinyu
. - p. 1067-1070 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439318
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>4H-SiC Beam Resonators with Tailored Local Zero TCF</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439318&Exemplar=1&LAN=DE A1 Long, Yaoyao A1 Liu, Zhenming A1 Jiang, Xinyu A1 Ayazi, Farrokh YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Time-frequency analysis K1 Resonant frequency K1 Resonators K1 Substrates K1 Stress K1 Thermal stability K1 4H-SiC K1 MEMS resonator K1 doubly clamped beam resonator K1 stress tuning K1 temperature compensation K1 temperature coefficient of frequency K1 thermal stability K1 frequency reference K1 MEMS oscillator SP 1067 OP 1070 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439318 DO https://doi.org/10.1109/MEMS58180.2024.10439318 SF ELIB - SuUB Bremen
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