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1 Ergebnisse
1
Polymethyl Methacrylate (PMMA) Pyrolysis Assisted Transfer ..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Liu, Zuheng
;
Wei, Jianyong
;
Zhang, Pengcheng
... - p. 677-680 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439327
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Polymethyl Methacrylate (PMMA) Pyrolysis Assisted Transfer of 2D Materials for Large-Scale Molybdenum Disulfide Nems Resonator Arrays</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439327&Exemplar=1&LAN=DE A1 Liu, Zuheng A1 Wei, Jianyong A1 Zhang, Pengcheng A1 Jia, Yueyang A1 Chen, Ying A1 Jia, Hao A1 Wang, Zenghui A1 Yang, Rui YR 2024 SN 2160-1968 K1 Fabrication K1 Nanoelectromechanical systems K1 Resonant frequency K1 Frequency measurement K1 Sulfur K1 Molybdenum K1 Tuning K1 2D NEMS K1 MoS2 resonators K1 PMMA pyrolysis K1 Large-scale resonator arrays K1 Device fabrication SP 677 OP 680 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439327 DO https://doi.org/10.1109/MEMS58180.2024.10439327 SF ELIB - SuUB Bremen
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