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1 Ergebnisse
1
A 2-AXIS SI/AL Bimorph-Based Electrothermal Micromirror Int..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Tang, Yue
;
Wang, Xiaoyi
;
Xu, Lixin
. - p. 757-760 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439337
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>A 2-AXIS SI/AL Bimorph-Based Electrothermal Micromirror Integrated with Piezoresistors for High Resolution Position Sensing</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439337&Exemplar=1&LAN=DE A1 Tang, Yue A1 Wang, Xiaoyi A1 Xu, Lixin A1 Xie, Huikai YR 2024 SN 2160-1968 K1 Fabrication K1 Silicon compounds K1 Piezoresistive devices K1 Silicon K1 Sensors K1 Micromirrors K1 Piezoresistance K1 MEMS micromirror K1 electrothermal actuation K1 SCS/Al bimorph K1 angular shift K1 feedback control SP 757 OP 760 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439337 DO https://doi.org/10.1109/MEMS58180.2024.10439337 SF ELIB - SuUB Bremen
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