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1 Ergebnisse
1
Ultra-Sensitive Resonant Low-Medium Vacuum Pressure Micro-S..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Alcheikh, Nouha
;
Mbarek, Sofiane Ben
;
Younis, Mohammad I.
- p. 797-800 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439345
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Ultra-Sensitive Resonant Low-Medium Vacuum Pressure Micro-Sensor</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439345&Exemplar=1&LAN=DE A1 Alcheikh, Nouha A1 Mbarek, Sofiane Ben A1 Younis, Mohammad I. YR 2024 SN 2160-1968 K1 Pressure sensors K1 Micromechanical devices K1 Sensitivity K1 Vacuum systems K1 Power demand K1 Resonant frequency K1 Tuning K1 Resonant pressure sensors K1 high sensitivity K1 low power K1 veering phenomenon SP 797 OP 800 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439345 DO https://doi.org/10.1109/MEMS58180.2024.10439345 SF ELIB - SuUB Bremen
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