I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
A Piezoelectric MEMS Resonant Temperature Sensor with 10-μk..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Yuan, Ye
;
Luo, Hexu
;
Gong, Yi
... - p. 983-986 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439359
RT T1
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
: T1
A Piezoelectric MEMS Resonant Temperature Sensor with 10-μk Resolution and 0.06-PJK2 Resolution FOM
UL https://suche.suub.uni-bremen.de/peid=ieee-10439359&Exemplar=1&LAN=DE A1 Yuan, Ye A1 Luo, Hexu A1 Gong, Yi A1 Zhang, Boyun A1 Li, Haolin A1 Pang, Wei A1 Li, Quanning A1 Sun, Mingchao A1 Zhang, Menglun YR 2024 SN 2160-1968 K1 Temperature sensors K1 Micromechanical devices K1 Temperature measurement K1 Sensitivity K1 Temperature K1 Silicon K1 Substrates K1 Piezoelectric K1 MEMS temperature sensor K1 TCF K1 Resolution SP 983 OP 986 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439359 DO https://doi.org/10.1109/MEMS58180.2024.10439359 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)