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1 Ergebnisse
1
A Piezoelectric MEMS Resonant Temperature Sensor with 10-μk..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Yuan, Ye
;
Luo, Hexu
;
Gong, Yi
... - p. 983-986 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439359
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>A Piezoelectric MEMS Resonant Temperature Sensor with 10-μk Resolution and 0.06-PJK2 Resolution FOM</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439359&Exemplar=1&LAN=DE A1 Yuan, Ye A1 Luo, Hexu A1 Gong, Yi A1 Zhang, Boyun A1 Li, Haolin A1 Pang, Wei A1 Li, Quanning A1 Sun, Mingchao A1 Zhang, Menglun YR 2024 SN 2160-1968 K1 Temperature sensors K1 Micromechanical devices K1 Temperature measurement K1 Sensitivity K1 Temperature K1 Silicon K1 Substrates K1 Piezoelectric K1 MEMS temperature sensor K1 TCF K1 Resolution SP 983 OP 986 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439359 DO https://doi.org/10.1109/MEMS58180.2024.10439359 SF ELIB - SuUB Bremen
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