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1 Ergebnisse
1
Enhanced Quality Factor in 2D NEMS Resonators by Optimizing..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Zhang, Pengcheng
;
Jia, Yueyang
;
Xie, Maosong
... - p. 634-637 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439363
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Enhanced Quality Factor in 2D NEMS Resonators by Optimizing Air Damping and Thermoelastic Damping</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439363&Exemplar=1&LAN=DE A1 Zhang, Pengcheng A1 Jia, Yueyang A1 Xie, Maosong A1 Liu, Zuheng A1 Zhang, Yijian A1 Shen, Minliang A1 Sun, Jiahao A1 Chen, Ying A1 Jia, Hao A1 Yang, Rui YR 2024 SN 2160-1968 K1 Q-factor K1 Damping K1 Temperature K1 Nanoelectromechanical systems K1 Sulfur K1 Molybdenum K1 Tuning K1 2D NEMS K1 resonators K1 gate tuning K1 air damping K1 thermoelastic damping K1 quality (Q) factor SP 634 OP 637 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439363 DO https://doi.org/10.1109/MEMS58180.2024.10439363 SF ELIB - SuUB Bremen
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