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1 Ergebnisse
1
Up-Scaling Microacoustics: 20 to 35 GHz ALN Resonators with..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Giribaldi, Gabriel
;
Colombo, Luca
;
Castellani, Matteo
... - p. 31-35 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439371
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Up-Scaling Microacoustics: 20 to 35 GHz ALN Resonators with f • Q Products Exceeding 14 THz</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439371&Exemplar=1&LAN=DE A1 Giribaldi, Gabriel A1 Colombo, Luca A1 Castellani, Matteo A1 Masud, Mohammed Ayaz A1 Piazza, Gianluca A1 Rinaldi, Matteo YR 2024 SN 2160-1968 K1 Q-factor K1 Micromechanical devices K1 Time-frequency analysis K1 Metals K1 Resonators K1 Millimeter wave communication K1 Strain K1 MEMS K1 piezoelectric resonators K1 aluminum nitride K1 quality factor SP 31 OP 35 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439371 DO https://doi.org/10.1109/MEMS58180.2024.10439371 SF ELIB - SuUB Bremen
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