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Impact of Excess Carbon at the 3C-SiC/SiO2 Interface Using ..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Moll, Philipp
;
Pfusterschmied, Georg
;
Schmid, Ulrich
- p. 606-609 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439413
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Impact of Excess Carbon at the 3C-SiC/SiO2 Interface Using LPCVD-Based Alternating Supply Deposition</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439413&Exemplar=1&LAN=DE A1 Moll, Philipp A1 Pfusterschmied, Georg A1 Schmid, Ulrich YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Silicon carbide K1 Conductivity K1 Silicon K1 Microstructure K1 Carbon K1 Substrates K1 3C-SiC K1 LPCVD K1 SiO2-interface K1 Film resistivity K1 Carbonization step SP 606 OP 609 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439413 DO https://doi.org/10.1109/MEMS58180.2024.10439413 SF ELIB - SuUB Bremen
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