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1 Ergebnisse
1
Laser-Based Fabrication Process for Piezoresistive Cantilev..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Nakashima, Rihachiro
;
Kan, Tetsuo
;
Takahashi, Hidetoshi
- p. 614-617 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439414
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Laser-Based Fabrication Process for Piezoresistive Cantilever Using Flash Laser Annealing</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439414&Exemplar=1&LAN=DE A1 Nakashima, Rihachiro A1 Kan, Tetsuo A1 Takahashi, Hidetoshi YR 2024 SN 2160-1968 K1 Fabrication K1 Optical fiber sensors K1 Annealing K1 Semiconductor lasers K1 Silicon K1 Piezoresistance K1 Fiber lasers K1 Piezoresistive cantilever K1 Flash laser annealing K1 Fiber laser SP 614 OP 617 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439414 DO https://doi.org/10.1109/MEMS58180.2024.10439414 SF ELIB - SuUB Bremen
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