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1 Ergebnisse
1
Impact of Grain Size on The Q-Factor of Poly-Crystalline Di..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Huber, Dominik
;
Platz, Daniel
;
Gesing, Andre
... - p. 915-918 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439421
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems Resonators</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439421&Exemplar=1&LAN=DE A1 Huber, Dominik A1 Platz, Daniel A1 Gesing, Andre A1 Fulmek, Paul A1 Steinmuller-Nethl, Doris A1 Pfusterschmied, Georg A1 Schmid, Ulrich YR 2024 SN 2160-1968 K1 Q-factor K1 Grain size K1 Micromechanical devices K1 Performance evaluation K1 Loss measurement K1 Resonators K1 Substrates K1 Poly-Crystalline-Diamond K1 Grain Size K1 Material Losses SP 915 OP 918 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439421 DO https://doi.org/10.1109/MEMS58180.2024.10439421 SF ELIB - SuUB Bremen
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