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1 Ergebnisse
1
Micro-Transfer Printing of Photoresist Using Adhesion- Swit..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Guo, Qinhua
;
Zhang, Jingyang
;
Shu, Xin
... - p. 669-672 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439425
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Micro-Transfer Printing of Photoresist Using Adhesion- Switchable Stamp for Patterning Unconventional Surface</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439425&Exemplar=1&LAN=DE A1 Guo, Qinhua A1 Zhang, Jingyang A1 Shu, Xin A1 Zhang, Jiajun A1 Chen, Qingming A1 Zhang, Shengdong A1 Wang, Yunda YR 2024 SN 2160-1968 K1 Printing K1 Microfabrication K1 Switched mode power supplies K1 Resists K1 Switches K1 Substrates K1 Surface treatment K1 Photoresist Transfer K1 Micro-transfer Printing K1 Unconventional Substrate Patterning K1 Adhesion-switchable Stamp K1 Shape Memory Polymer SP 669 OP 672 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439425 DO https://doi.org/10.1109/MEMS58180.2024.10439425 SF ELIB - SuUB Bremen
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