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1 Ergebnisse
1
Demonstration of MHz Piezoelectric Micromachined Ultrasonic..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Wang, Dengke
;
Ji, Yucheng
;
Wang, Shaokun
.. - p. 955-958 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439433
RT T1
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
: T1
Demonstration of MHz Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) Array and the Potential Application in Biomedical Therapies
UL https://suche.suub.uni-bremen.de/peid=ieee-10439433&Exemplar=1&LAN=DE A1 Wang, Dengke A1 Ji, Yucheng A1 Wang, Shaokun A1 Lyu, Haochen A1 Zhang, Songsong YR 2024 SN 2160-1968 K1 Temperature sensors K1 Heating systems K1 Ultrasonic transducers K1 Electric potential K1 Ultrasonic transducer arrays K1 Eye diseases K1 Acoustics K1 MEMS K1 PMUTs K1 cavity silicon on insulator (CSOI) K1 ultrasonic treatment SP 955 OP 958 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439433 DO https://doi.org/10.1109/MEMS58180.2024.10439433 SF ELIB - SuUB Bremen
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