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1 Ergebnisse
1
Two-Dimensional Piezoelectrically Actuated Micromirror with..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Sasaki, Takashi
;
Piot, Adrien
;
Fleury, Clement
... - p. 1015-1018 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439446
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439446&Exemplar=1&LAN=DE A1 Sasaki, Takashi A1 Piot, Adrien A1 Fleury, Clement A1 Guerreiro, Sara A1 Rocha, Rodrigo T. A1 Lagosh, Anton YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Actuators K1 Lasers K1 Focusing K1 Micromirrors K1 Micromirror K1 varifocal mirror K1 two-dimensional laser scanning K1 piezoelectric actuator SP 1015 OP 1018 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439446 DO https://doi.org/10.1109/MEMS58180.2024.10439446 SF ELIB - SuUB Bremen
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