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1 Ergebnisse
1
A Diaphragm Triaxial Force Sensor Using Soi Technology With..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Lin, Cong
;
Zhu, Xincheng
;
Liu, Yi
... - p. 833-836 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439449
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>A Diaphragm Triaxial Force Sensor Using Soi Technology With High Sensitivity and Large Force Range</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439449&Exemplar=1&LAN=DE A1 Lin, Cong A1 Zhu, Xincheng A1 Liu, Yi A1 Miao, Jiahao A1 Zhou, Zhanxuan A1 Wang, Xueliang A1 Yu, Xiaomei YR 2024 SN 2160-1968 K1 Sensitivity K1 Piezoresistive devices K1 Force K1 Packaging K1 Robot sensing systems K1 Strain measurement K1 Force sensors K1 Triaxial force sensor K1 normal force K1 shear force K1 piezoresistor K1 minimum detectable force K1 force range SP 833 OP 836 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439449 DO https://doi.org/10.1109/MEMS58180.2024.10439449 SF ELIB - SuUB Bremen
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