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1 Ergebnisse
1
Using Reverse-Trapezoid Cantilevers and Sealed Back-Chamber..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Tseng, Chin
;
Wei, Ting-Chou
;
Lin, Chia-Hao
.. - p. 721-724 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439460
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Using Reverse-Trapezoid Cantilevers and Sealed Back-Chamber to Enhance the Performance of Mems Piezoelectric Microspeaker at Ultra-High Frequencies</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439460&Exemplar=1&LAN=DE A1 Tseng, Chin A1 Wei, Ting-Chou A1 Lin, Chia-Hao A1 Hu, Zih-Song A1 Fang, Weileun YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Couplings K1 Resonant frequency K1 Linearity K1 Bandwidth K1 Piezoelectric K1 MEMS microspeaker K1 Reverse-trapezoid K1 Sealed back-chamber K1 Ultra-high frequencies K1 Size miniaturization SP 721 OP 724 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439460 DO https://doi.org/10.1109/MEMS58180.2024.10439460 SF ELIB - SuUB Bremen
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