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1 Ergebnisse
1
A Miniature Spot Position Detector Based on a Resonant Calo..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Quan, Aojie
;
Wang, Chen
;
Zhang, Hemin
... - p. 987-990 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439469
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439469&Exemplar=1&LAN=DE A1 Quan, Aojie A1 Wang, Chen A1 Zhang, Hemin A1 Guan, Yangyang A1 Li, Chengxin A1 Wang, Chenxi A1 Kraft, Michael YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Laser noise K1 Measurement by laser beam K1 Detectors K1 Position measurement K1 Size measurement K1 Floors K1 Laser spot position detection K1 low noise K1 self-oscillation K1 sensitivity optimization SP 987 OP 990 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439469 DO https://doi.org/10.1109/MEMS58180.2024.10439469 SF ELIB - SuUB Bremen
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