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1 Ergebnisse
1
An Electrothermal Micromirror Array Integrated with Thermal..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Ren, Anrun
;
Ding, Yingtao
;
Yang, Hengzhang
... - p. 170-173 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439487
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>An Electrothermal Micromirror Array Integrated with Thermal Convection-Based Mirror Position Sensors</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439487&Exemplar=1&LAN=DE A1 Ren, Anrun A1 Ding, Yingtao A1 Yang, Hengzhang A1 Pan, Teng A1 Zhang, Ziyue A1 Xie, Huikai YR 2024 SN 2160-1968 K1 Mechanical sensors K1 Temperature sensors K1 Sensitivity K1 Thermistors K1 Sensor systems K1 Micromirrors K1 Sensor arrays K1 Thermal convection K1 micromirror array K1 mirror plate position sensor SP 170 OP 173 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439487 DO https://doi.org/10.1109/MEMS58180.2024.10439487 SF ELIB - SuUB Bremen
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