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1 Ergebnisse
1
A Novel Resonant MEMS Accelerometer Operating in Air with T..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Wang, Chen
;
Quan, Aojie
;
Wang, Linlin
... - p. 903-906 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439523
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439523&Exemplar=1&LAN=DE A1 Wang, Chen A1 Quan, Aojie A1 Wang, Linlin A1 Esteves, Rui Amendoeira A1 Wang, Yuan A1 Madeira, Bernardo P. A1 Guan, Yangyang A1 Wu, Xinyu A1 Kuznetsova, Nadezda A1 Shojaeian, Milad A1 Zhang, Pan A1 Mak, Pui-In A1 Kraft, Michael YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Accelerometers K1 Q-factor K1 Sensitivity K1 Sensors K1 Resonators K1 Piezoresistance K1 Thermal actuation K1 piezoresistive resonators K1 microelectromechanical system (MEMS) accelerometer K1 quality (Q) factor SP 903 OP 906 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439523 DO https://doi.org/10.1109/MEMS58180.2024.10439523 SF ELIB - SuUB Bremen
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