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1 Ergebnisse
1
Bandwidth Enhancement of Piezoelectric MEMS Microspeaker Vi..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Lin, Chia-Hao
;
Wei, Ting-Chou
;
Tseng, Chin
... - p. 713-716 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439530
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Bandwidth Enhancement of Piezoelectric MEMS Microspeaker Via Central Diaphragm Actuation and Filter Integration</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439530&Exemplar=1&LAN=DE A1 Lin, Chia-Hao A1 Wei, Ting-Chou A1 Tseng, Chin A1 Hu, Zih-Song A1 Lai, Mei-Feng A1 Fang, Weileun YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Electrodes K1 Actuators K1 Voltage measurement K1 Bandwidth K1 Residual stresses K1 Springs K1 Piezoelectric MEMS microspeaker K1 acoustics device K1 filter integration K1 SPL K1 bandwidth SP 713 OP 716 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439530 DO https://doi.org/10.1109/MEMS58180.2024.10439530 SF ELIB - SuUB Bremen
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