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1 Ergebnisse
1
A Microfabricated Column Comprised of High-Aspect-Ratio Sil..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Seong, Dong Wook
;
Kuk Bae, Sung
;
Seo, Jung Hwan
- p. 867-870 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439537
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>A Microfabricated Column Comprised of High-Aspect-Ratio Silicon Pillar Arrays for Micro-Gas Chromatography</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439537&Exemplar=1&LAN=DE A1 Seong, Dong Wook A1 Kuk Bae, Sung A1 Seo, Jung Hwan YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Temperature measurement K1 Power demand K1 System performance K1 Packaging K1 Parallel processing K1 Silicon K1 Silicon Pillar K1 Micro-Gas Chromatography (µ-GC) K1 Micro-Separation Column K1 Volatile Organic Compounds (VOCs) SP 867 OP 870 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439537 DO https://doi.org/10.1109/MEMS58180.2024.10439537 SF ELIB - SuUB Bremen
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