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1 Ergebnisse
1
Glass as A Functional Material for Micro Electromechanical ..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Bertke, Maik
;
Schudak, Svenja
;
Ostholt, Roman
- p. 646-649 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439553
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Glass as A Functional Material for Micro Electromechanical Systems</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439553&Exemplar=1&LAN=DE A1 Bertke, Maik A1 Schudak, Svenja A1 Ostholt, Roman YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Fabrication K1 Force measurement K1 Glass K1 Etching K1 Finite element analysis K1 Springs K1 glass MEMS K1 glass microstructures K1 LIDE K1 high aspect ratio glass micro features SP 646 OP 649 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439553 DO https://doi.org/10.1109/MEMS58180.2024.10439553 SF ELIB - SuUB Bremen
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