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A Two-Axis Sensing Mems Magnetometer with Monolithic Moving..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Jung, Yohan
;
Jo, Eunhwan
;
Kim, Jongbaeg
- p. 44-47 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439558
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>A Two-Axis Sensing Mems Magnetometer with Monolithic Moving Parts in Orthogonal Resonance Order</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439558&Exemplar=1&LAN=DE A1 Jung, Yohan A1 Jo, Eunhwan A1 Kim, Jongbaeg YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Microelectromechanical systems K1 Sensitivity K1 Magnetometers K1 Magnetic resonance K1 Sensors K1 Magnetic fields K1 Eccentric resonator K1 electromagnetic induction K1 electrostatic driving K1 magnetometer SP 44 OP 47 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439558 DO https://doi.org/10.1109/MEMS58180.2024.10439558 SF ELIB - SuUB Bremen
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