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1 Ergebnisse
1
Piezoelectric MEMS Mirror with Cantilever-Type Actuator for..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Abe, Yosuke
;
Akanuma, Goichi
;
Shinkawa, Mizuki
... - p. 1007-1010 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439561
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Piezoelectric MEMS Mirror with Cantilever-Type Actuator for Compact, Low-Voltage Drive, and Wide-Angle Deflection</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439561&Exemplar=1&LAN=DE A1 Abe, Yosuke A1 Akanuma, Goichi A1 Shinkawa, Mizuki A1 Hashiguchi, Tsuyoshi A1 Sato, Masaaki A1 Suzuki, Shuichi A1 Sakai, Atsushi A1 Ishimoto, Yukiyoshi YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Actuators K1 Low voltage K1 Optical device fabrication K1 Voltage K1 Mirrors K1 High-speed optical techniques K1 MEMS scanner K1 MEMS mirror K1 PZT K1 piezoelectric actuator K1 resonant scanner SP 1007 OP 1010 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439561 DO https://doi.org/10.1109/MEMS58180.2024.10439561 SF ELIB - SuUB Bremen
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