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1 Ergebnisse
1
Integrated Resonant Cantilever with Dual Thermoanalytical F..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Yang, Yuhang
;
Jia, Hao
;
Cao, Zhi
... - p. 209-212 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439602
RT T1
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
: T1
Integrated Resonant Cantilever with Dual Thermoanalytical Functions of Thermogravimetric Analysis and Differential Thermal Analysis
UL https://suche.suub.uni-bremen.de/peid=ieee-10439602&Exemplar=1&LAN=DE A1 Yang, Yuhang A1 Jia, Hao A1 Cao, Zhi A1 Zhang, Haozhi A1 Xu, Pengcheng A1 Li, Xinxin YR 2024 SN 2160-1968 K1 Temperature measurement K1 Micromechanical devices K1 Semiconductor device measurement K1 Sensitivity K1 Thermocouples K1 Mechanical variables measurement K1 Thermal analysis K1 Thermogravimetric analysis K1 Differential thermal analysis K1 resonant cantilever K1 thermocouple K1 scientific instrument SP 209 OP 212 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439602 DO https://doi.org/10.1109/MEMS58180.2024.10439602 SF ELIB - SuUB Bremen
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