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1 Ergebnisse
1
Epitaxial SM-Doped PMN-Pt Film with High Piezoelectric Cons..:
, In:
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
,
Fukushi, Kai
;
Yoshida, Shinya
;
Qi, Xuanmeng
. - p. 765-768 , 2024
Link:
https://doi.org/10.1109/MEMS58180.2024.10439604
RT T1 <cTitle>2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Epitaxial SM-Doped PMN-Pt Film with High Piezoelectric Constant for MEMS Application</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10439604&Exemplar=1&LAN=DE A1 Fukushi, Kai A1 Yoshida, Shinya A1 Qi, Xuanmeng A1 Tanaka, Shuji YR 2024 SN 2160-1968 K1 Micromechanical devices K1 Buffer layers K1 Actuators K1 Transducers K1 Silicon K1 Sputtering K1 Substrates K1 Sm-PMN-PT K1 Epitaxial growth K1 Piezoelectric MEMS actuator K1 Piezoelectric monocrystalline thin film SP 765 OP 768 LK http://dx.doi.org/https://doi.org/10.1109/MEMS58180.2024.10439604 DO https://doi.org/10.1109/MEMS58180.2024.10439604 SF ELIB - SuUB Bremen
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