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1 Ergebnisse
1
A Method for Diagnosing the Process Chamber Prior to Plasma..:
, In:
2023 Asia-Pacific Microwave Conference (APMC)
,
Kim, Seong-Jin
;
Jung, Heechul
;
Lee, Hyo-Won
... - p. 366-368 , 2023
Link:
https://doi.org/10.1109/APMC57107.2023.10439894
RT T1
2023 Asia-Pacific Microwave Conference (APMC)
: T1
A Method for Diagnosing the Process Chamber Prior to Plasma Processes
UL https://suche.suub.uni-bremen.de/peid=ieee-10439894&Exemplar=1&LAN=DE A1 Kim, Seong-Jin A1 Jung, Heechul A1 Lee, Hyo-Won A1 Lim, Seongju A1 Lee, Ji-Hoon A1 Yu, Jong-Won A1 Kim, Jaehyun A1 Lee, Sang Won YR 2023 K1 Plasma diagnostics K1 Resonant frequency K1 Plasma measurements K1 Vectors K1 Broadband communication K1 Probes K1 Monitoring K1 chamber diagnostics K1 multipole resonance probe K1 semiconductor manufacturing process K1 3-D electromagnetic simulations SP 366 OP 368 LK http://dx.doi.org/https://doi.org/10.1109/APMC57107.2023.10439894 DO https://doi.org/10.1109/APMC57107.2023.10439894 SF ELIB - SuUB Bremen
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