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Wafer Level Fabrication of Embedded Silicon Microcooler on ..:

, In: 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC),
Long, Lau Boon ; Ong, Javier ; Au, Jason... - p. 1063-1066 , 2023
Link: https://doi.org/10.1109/EPTC59621.2023.10457612