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1 Ergebnisse
1
Effect of PECVD Thickness on Warpage Behavior of 3DS TSV Wa..:
, In:
2023 IEEE 25th Electronics Packaging Technology Conference (EPTC)
,
Wang, Bill
;
Fan, Morgan
;
Quan, Changhao
... - p. 1071-1074 , 2023
Link:
https://doi.org/10.1109/EPTC59621.2023.10457617
RT T1
2023 IEEE 25th Electronics Packaging Technology Conference (EPTC)
: T1
Effect of PECVD Thickness on Warpage Behavior of 3DS TSV Wafer
UL https://suche.suub.uni-bremen.de/peid=ieee-10457617&Exemplar=1&LAN=DE A1 Wang, Bill A1 Fan, Morgan A1 Quan, Changhao A1 Charles A1 Wu, Lin A1 Zhang, Paul YR 2023 K1 Silicon compounds K1 Radio frequency K1 Three-dimensional displays K1 Simulation K1 Process control K1 Packaging K1 Silicon K1 3D Stacking K1 TSV Backside Process K1 PECVD K1 Wafer Warpage Control SP 1071 OP 1074 LK http://dx.doi.org/https://doi.org/10.1109/EPTC59621.2023.10457617 DO https://doi.org/10.1109/EPTC59621.2023.10457617 SF ELIB - SuUB Bremen
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