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Patterned Fabry-Perot Filter Fabrication on Transparent waf..:

, In: 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC),
Yoo, Tae Jin ; Geelen, Bert ; Tack, Klaas. - p. 873-876 , 2023
Link: https://doi.org/10.1109/EPTC59621.2023.10457661