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1 Ergebnisse
1
Patterning on reflective (Al) surface using auto alignment ..:
, In:
2023 IEEE 25th Electronics Packaging Technology Conference (EPTC)
,
Sundaram, Arvind
;
Pitchappa, Prakash
;
Zhonghua, Gu
.. - p. 603-607 , 2023
Link:
https://doi.org/10.1109/EPTC59621.2023.10457704
RT T1 <cTitle>2023 IEEE 25th Electronics Packaging Technology Conference (EPTC)</cTitle>: T1 <Title>Patterning on reflective (Al) surface using auto alignment in immersion lithography to achieve tight overlay for reconfigurable metasurface devices</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10457704&Exemplar=1&LAN=DE A1 Sundaram, Arvind A1 Pitchappa, Prakash A1 Zhonghua, Gu A1 Yoo, Jae Ok A1 Singh, Navab YR 2023 K1 Silicon compounds K1 Image resolution K1 Lithography K1 Lighting K1 Manuals K1 Metasurfaces K1 Silicon SP 603 OP 607 LK http://dx.doi.org/https://doi.org/10.1109/EPTC59621.2023.10457704 DO https://doi.org/10.1109/EPTC59621.2023.10457704 SF ELIB - SuUB Bremen
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