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1 Ergebnisse
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Investigation of Immersion Alignment Mark Signal and Alignm..:
, In:
2023 IEEE 25th Electronics Packaging Technology Conference (EPTC)
,
Tew, Chin Khang
;
Tobing, Landobasa Y. M.
;
Yoo, Jae Ok
. - p. 592-595 , 2023
Link:
https://doi.org/10.1109/EPTC59621.2023.10457736
RT T1 <cTitle>2023 IEEE 25th Electronics Packaging Technology Conference (EPTC)</cTitle>: T1 <Title>Investigation of Immersion Alignment Mark Signal and Alignment Success Rate for Flat Optics with Aperture on Chip</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10457736&Exemplar=1&LAN=DE A1 Tew, Chin Khang A1 Tobing, Landobasa Y. M. A1 Yoo, Jae Ok A1 Singh, Navab YR 2023 K1 Optical polarization K1 Systematics K1 Planarization K1 Optical design K1 Optical device fabrication K1 Apertures K1 Surfaces SP 592 OP 595 LK http://dx.doi.org/https://doi.org/10.1109/EPTC59621.2023.10457736 DO https://doi.org/10.1109/EPTC59621.2023.10457736 SF ELIB - SuUB Bremen
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