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1 Ergebnisse
1
Study on sonic-assisted processing method for micro pattern..:
, In:
2024 1st International Conference on Robotics, Engineering, Science, and Technology (RESTCON)
,
Yamamoto, Soma
;
Fukushige, Yuho
;
Nishizawa, Hideaki
.. - p. 55-58 , 2024
Link:
https://doi.org/10.1109/RESTCON60981.2024.10463595
RT T1 <cTitle>2024 1st International Conference on Robotics, Engineering, Science, and Technology (RESTCON)</cTitle>: T1 <Title>Study on sonic-assisted processing method for micro pattern formation on Cu film</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10463595&Exemplar=1&LAN=DE A1 Yamamoto, Soma A1 Fukushige, Yuho A1 Nishizawa, Hideaki A1 Khajornrungruang, Panart A1 Suzuki, Keisuke YR 2024 K1 Vibrations K1 Productivity K1 Pattern formation K1 Shape K1 Surface waves K1 Dry etching K1 Lithography K1 sonic-assisted processing K1 resonance SP 55 OP 58 LK http://dx.doi.org/https://doi.org/10.1109/RESTCON60981.2024.10463595 DO https://doi.org/10.1109/RESTCON60981.2024.10463595 SF ELIB - SuUB Bremen
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