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1 Ergebnisse
1
A DLTS study on Deep Trench Processing induced Trap States ..:
, In:
2023 IEEE International Integrated Reliability Workshop (IIRW)
,
Stampfer, Paul
;
Stampfer, Bernhard
;
Roger, Frederic
... - p. 1-4 , 2023
Link:
https://doi.org/10.1109/IIRW59383.2023.10477712
RT T1 <cTitle>2023 IEEE International Integrated Reliability Workshop (IIRW)</cTitle>: T1 <Title>A DLTS study on Deep Trench Processing induced Trap States in Silicon Photodiodes</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10477712&Exemplar=1&LAN=DE A1 Stampfer, Paul A1 Stampfer, Bernhard A1 Roger, Frederic A1 Minixhofer, Rainer A1 Grasser, Tibor A1 Waltl, Michael YR 2023 SN 2374-8036 K1 Performance evaluation K1 Semiconductor device measurement K1 Radiative recombination K1 Lead K1 Silicon K1 Oxidation K1 Semiconductor diodes K1 Deep trench isolation K1 photodiode K1 interface recombination K1 responsivity K1 linearity SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IIRW59383.2023.10477712 DO https://doi.org/10.1109/IIRW59383.2023.10477712 SF ELIB - SuUB Bremen
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