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1
Motion Detection Method of Electrostatic MEMS Resonators Op..:
, In:
2024 6th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE)
,
Hemid, Mohamed
;
Alattar, Basil
;
Ghommem, Mehdi
... - p. 1-6 , 2024
Link:
https://doi.org/10.1109/REEPE60449.2024.10479756
RT T1
2024 6th International Youth Conference on Radio Electronics, Electrical and Power Engineering (REEPE)
: T1
Motion Detection Method of Electrostatic MEMS Resonators Operating in Aqueous Media
UL https://suche.suub.uni-bremen.de/peid=ieee-10479756&Exemplar=1&LAN=DE A1 Hemid, Mohamed A1 Alattar, Basil A1 Ghommem, Mehdi A1 Ahmed, Alaaeldin A1 Abdel-Rahman, Eihab A1 Sabouni, Rana YR 2024 SN 2831-7262 K1 Micromechanical devices K1 Electrostatic measurements K1 Resonant frequency K1 Media K1 Harmonic analysis K1 Motion detection K1 Sensors K1 Electrostatic resonator K1 aqueous media K1 motioninduced current K1 motion detection K1 chemical sensing SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/REEPE60449.2024.10479756 DO https://doi.org/10.1109/REEPE60449.2024.10479756 SF ELIB - SuUB Bremen
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