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1
Hybrid PMUT realized using an innovative "Piezo-in-flex" te..:
, In:
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
,
Casset, F.
;
Rascle, A.
;
Prat, C.
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/EuroSimE60745.2024.10491429
RT T1 <cTitle>2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)</cTitle>: T1 <Title>Hybrid PMUT realized using an innovative "Piezo-in-flex" technology</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10491429&Exemplar=1&LAN=DE A1 Casset, F. A1 Rascle, A. A1 Prat, C. A1 Gerfault, L. A1 Brulais, S. A1 Saborit, L. Peris y A1 Perrier, R. A1 Mermin, D. A1 Franiatte, R. A1 Mendes, M. Kazar A1 Liechti, R. A1 Colin, M. YR 2024 SN 2833-8596 K1 Actuators K1 Costs K1 Vibrometers K1 Resonant frequency K1 Acoustic measurements K1 Silicon K1 Frequency measurement SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/EuroSimE60745.2024.10491429 DO https://doi.org/10.1109/EuroSimE60745.2024.10491429 SF ELIB - SuUB Bremen
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