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1 Ergebnisse
1
Advanced strategies for high activation in ion implanted 4H..:
, In:
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
,
Calabretta, C.
;
Pecora, A.
;
Agati, M.
... - p. 1-5 , 2024
Link:
https://doi.org/10.1109/EuroSimE60745.2024.10491439
RT T1 <cTitle>2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)</cTitle>: T1 <Title>Advanced strategies for high activation in ion implanted 4H-SiC by laser annealing</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10491439&Exemplar=1&LAN=DE A1 Calabretta, C. A1 Pecora, A. A1 Agati, M. A1 Muoio, A. A1 Scuderi, V. A1 Privitera, S. A1 Reitano, R. A1 Piluso, N. A1 Severino, A. A1 Boninelli, S. A1 Via, F. La YR 2024 SN 2833-8596 K1 Radiation effects K1 Annealing K1 Transmission electron microscopy K1 Microscopy K1 Surface emitting lasers K1 Graphite K1 Laser modes SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/EuroSimE60745.2024.10491439 DO https://doi.org/10.1109/EuroSimE60745.2024.10491439 SF ELIB - SuUB Bremen
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