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A Lumped Element model for biaxial MEMS scanners:
, In:
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
,
Liechti, Romain
;
Hamelin, Antoine
;
Dieppedale, Christel
. - p. 1-8 , 2024
Link:
https://doi.org/10.1109/EuroSimE60745.2024.10491449
RT T1 <cTitle>2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)</cTitle>: T1 <Title>A Lumped Element model for biaxial MEMS scanners</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10491449&Exemplar=1&LAN=DE A1 Liechti, Romain A1 Hamelin, Antoine A1 Dieppedale, Christel A1 Mollard, Laurent YR 2024 SN 2833-8596 K1 Micromechanical devices K1 Performance evaluation K1 Adaptation models K1 Biological system modeling K1 Reliability engineering K1 Laser modes K1 Microelectronics SP 1 OP 8 LK http://dx.doi.org/https://doi.org/10.1109/EuroSimE60745.2024.10491449 DO https://doi.org/10.1109/EuroSimE60745.2024.10491449 SF ELIB - SuUB Bremen
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