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1
Design Optimization of a Corrugated Piezoelectric MEMS Micr..:
, In:
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
,
Bosetti, Gabriele
;
Bretthauer, Christian
;
Bogner, Andreas
... - p. 1-5 , 2024
Link:
https://doi.org/10.1109/EuroSimE60745.2024.10491462
RT T1 <cTitle>2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)</cTitle>: T1 <Title>Design Optimization of a Corrugated Piezoelectric MEMS Microphone applying Genetic Algorithms</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10491462&Exemplar=1&LAN=DE A1 Bosetti, Gabriele A1 Bretthauer, Christian A1 Bogner, Andreas A1 Krenzer, Michael A1 Gierl, Karolina A1 Heiss, Heinrich A1 Schrag, Gabriele YR 2024 SN 2833-8596 K1 Micromechanical devices K1 Performance evaluation K1 Microelectronics K1 Task analysis K1 Optimization K1 Microphones K1 Genetic algorithms SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/EuroSimE60745.2024.10491462 DO https://doi.org/10.1109/EuroSimE60745.2024.10491462 SF ELIB - SuUB Bremen
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