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1 Ergebnisse
1
High precision electrostatic MEMS actuators for in-plane Fa..:
, In:
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
,
Shaporin, Alexey
;
Wecker, Julia
;
Runge, Juliane
... - p. 1-5 , 2024
Link:
https://doi.org/10.1109/EuroSimE60745.2024.10491559
RT T1 <cTitle>2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)</cTitle>: T1 <Title>High precision electrostatic MEMS actuators for in-plane Fabry-Pérot gas sensors</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10491559&Exemplar=1&LAN=DE A1 Shaporin, Alexey A1 Wecker, Julia A1 Runge, Juliane A1 Voigt, Sebastian A1 Melzer, Marcel A1 Kurth, Steffen A1 Hiller, Karla YR 2024 SN 2833-8596 K1 Micromechanical devices K1 Fabrication K1 Couplings K1 Actuators K1 Silicon devices K1 Optical waveguide components K1 Optical variables measurement SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/EuroSimE60745.2024.10491559 DO https://doi.org/10.1109/EuroSimE60745.2024.10491559 SF ELIB - SuUB Bremen
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