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1
Assessing innovative bulk (111) 3C-SiC epitaxial growth:
, In:
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
,
Calabretta, C.
;
Scuderi, V.
;
Bongiorno, C.
... - p. 1-5 , 2024
Link:
https://doi.org/10.1109/EuroSimE60745.2024.10491570
RT T1 <cTitle>2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)</cTitle>: T1 <Title>Assessing innovative bulk (111) 3C-SiC epitaxial growth</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10491570&Exemplar=1&LAN=DE A1 Calabretta, C. A1 Scuderi, V. A1 Bongiorno, C. A1 Anzalone, R. A1 Mauceri, M. A1 Crippa, D. A1 Boninelli, S. A1 Via, F. La YR 2024 SN 2833-8596 K1 Scanning electron microscopy K1 Transmission electron microscopy K1 Microscopy K1 Atomic layer deposition K1 Lattices K1 Crystals K1 Silicon SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/EuroSimE60745.2024.10491570 DO https://doi.org/10.1109/EuroSimE60745.2024.10491570 SF ELIB - SuUB Bremen
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