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Selective Wet Etching Technology in 3D NAND Flash Manufactu..:

, In: 2023 24th International Conference on Electronic Packaging Technology (ICEPT),
Zhou, Zihan ; Han, Silin ; Wu, Yunwen... - p. 1-5 , 2023
Link: https://doi.org/10.1109/ICEPT59018.2023.10492364